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ITO target
Table 1:
|
Item |
Specification |
|
composition |
In2O3:SnO2=90:10(wt%),to match customers’requirements |
|
purity |
4N(see schedule) |
|
relative density |
≥99.3%(theoretical density is 7.15g/cm3) |
|
resistivity |
≤1.8Ω·mm2/m |
|
deoxygenation coefficient |
≤0.5% |
|
physical specifications |
flaky or other shape, its size and the deviation from the two sides agreed to supply and demand |
|
appearance |
exterior color uniformity; surface smooth, free of cracks, chipping, and without any inclusions and contaminants |
|
internal defects |
internal no cracks, no exotic matter |
Schedule:
|
Impurities(×10-6)less than unit:wt% |
|
Fe |
Pb |
Zn |
Ni |
Cu |
Cd |
Al |
Si |
Ca |
Mg |
|
15 |
10 |
10 |
5 |
5 |
5 |
15 |
15 |
15 |
5 |
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